Nha VQ, Thang LV, Thuy Linh HT, Gorbachuk NI, Cuong NX. Formation of radiation-disturbed layer in Al/SiO2/n-Si structures irradiated with helium ions with energy 5 MeV. hueuni-jns [Internet]. 2020Aug.5 [cited 2024Nov.15];129(1D):71-5. Available from: http://222.255.146.83/index.php/hujos-ns/article/view/5765